![]() ![]() ![]() Optical beam steering is important for engineered light projection in numerous applications including displays 1, 2, microscopy 3, 4, 5, 6 light detection and ranging (LiDAR) 7, 8, communications 9, 10, and ion/atom manipulation in quantum processors 11, 12, 13 Most commonly, beam scanning is implemented with discrete components, such as galvo-scanners, micro-electromechanical systems (MEMS) mirrors, or acousto-optic deflectors 14. The microcantilever-integrated photonic circuits miniaturize and simplify light projectors to enable versatile, power-efficient, and broadband laser scanner microchips. ![]() The microcantilevers are monolithically integrated in an active photonic platform on 200-mm silicon wafers. The microcantilevers have ultracompact ~0.1 mm 2 areas, consume ~31 to 46 mW of power, are simple to control, and emit a single light beam. Using microcantilevers embedded with silicon nitride nanophotonic circuitry, we demonstrate broadband, one- and two-dimensional steering of light with wavelengths from 410 nm to 700 nm. Here, we introduce a laser beam scanner that meets these requirements. An outstanding challenge remains to simultaneously achieve a compact footprint, broad wavelength operation, and low power consumption. Reducing the scanners to microchip form factors has spurred the development of very-large-scale photonic integrated circuits of optical phased arrays and focal plane switched arrays. Laser beam scanning is central to many applications, including displays, microscopy, three-dimensional mapping, and quantum information. ![]()
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